- Working range - Wavelength(nm) : 240nm – 3000m - Volume : Φ370 * 2 Fixture, Φ450 * 1 Fixture - Material(Target) : 4 Zone Target - Ta/Si, Hfo2/Sio2, Al/Si  - 제어 방식 : broadband optical monitoring(BBOM)  - High Reflection Laser mirror  - Broadband AR coating  - High performance Spectral filter  - Special coating Advantages of IBS  - high durability  - High Laser damage threshold  - High reflectance & High transmittance  - low losses  - High packing density and No spectral shift

 - DLC coating for Si & Ge substrate for Optical system  - Plasma Enhanced Chemical Vapor Deposition (PECVD)  - Extreme scratch resistance  - High resistance to abrasion and wear  - High hardness and Low friction coefficient  - Max up Φ500mm  - It is a preferred choice in defense and security applications where require an anti-reflective coating with high durability and ability to withstand harsh conditions.

 - High deposition rate  - High Laser Damage Threshold  - High packing density and No spectral shift (with Plasma Ion Assisted Deposition (PIAD))  - Plasma source      - Low energy & High ion density      - Does not damage the deposited thin film  - Optical thickness monitoring and fully automated deposition system  - High uniformity

 - High deposition rate  - High Laser Damage Threshold  - Since variable coating materials(metals, oxides, fluorides, sulfides) can be deposited, the application range is from DUV to IR.  - RF Ion source  - High packing density and No spectral shift (with Ion beam Assisted Deposition (IAD))  - Optical thickness monitoring and fully automated deposition system  - High volume capacity (Chamber size : Φ900mm ~ Φ2700mm)

- Maximum measured diameter: 400mm - Lens centering measurement accuracy : 0.1μm - Lens centering measurement: 40 surfaces (20 lenses) – Air Gap Measurement : 800mm – Effective Focal Length (EFL) – Back Focal Length (BFL) – Radius of curvature – IR lens & cylindrical lens measurement – Modulation Transfer Function (MTF) on-axis – Aspheric eccentricity measurement

반사+투과+흡수율 측정 대비 정밀한 고반사율 측정  - 공진기 방식의 고반사율 측정 [355,532,1064nm]  - 고반사미러의 반사율 99.9995%측정 가능  - 다양한 입사각 측정으로 lens 측정가능: 5~45º  - s and p-pol 의 측정 가능

- 측정 range : X(700mm), Y(1,000mm), Z(600mm) - 측정 분해능 : 0.1um - 최대허용오차 : 1.9um + L/300mm당 -Benefits :      → L형 브리지 구조 채용으로 구동 안정성 향상      → 각 축 화강암 사용으로 열 변형 최소화      → 동일분포 열팽창으로 보정 및 교정의 균일성 확보      → 초고속 스캐닝 측정에 적합한 고정밀 3차원 측정기      → 경량화로 초고속 고정밀 측정에 적합한 안정적 구조 채용

- 측정 range : up to Φ300mm(depending on part geometry - 축구성(mm) : X(190), Y(+/-5), Z(800), A(∞°), B(+69°/-59°), C(+/-2°)                      H(300), V(300), T(+100°/-200°), S(∞°), W(∞°) - Asphere repeatability : <10nm rms (veridation report기준) - Max asphere departure : ≤1000waves (0.6mm) - 측정가능 형상 : Sphere, Asphere, Freeform

- Working range : up to Φ1000mm - Axis repeatability : 0.01mm - 축구성(mm) : X(1000), Y(1000), Z(280), V(400), A(-40°/+70°),                      B(+/-40°), C(0°/360°) - Figure correction : < λ/200(PV)                                depending on measurement system - 가공가능 형상 : Sphere, Asphere, Cylinder

 - Working range : Spiral (Φ600)_비구면, Raster (580 x 580)_사각 형상  - 축구성(mm): X(600), Y(600), Z(350), B(+/-90°), C1(+/-90°), C2(1000rpm), T/S(3000rpm)  - Figure correction : < λ/2~λ/5(PV)  - 가공 가능 형상 : Spheres, Aspheres, Off-Axis-Parabolic(OAP), Freeform  - Benefits : → The large range of usable tools like Polishing Wheel (Wheel Polishing Technology),  Active Fluid Jet Polishing (A-FJP), different pitch tools → Direct interface to tactile and optical surface measuring systems like Taylor-Hobson Form Talysurf, Mahr MarSurf, Mitutoyo or OptoTech Interferometers → Use of conventional consumables (e.g. Cerium oxide as polishing medium, polyurethane as polishing medium carrier)

- Working range : Rotation mode ~ Φ300mm                                  Raster mode ~300 x 300mm - Axis structure(mm) : X(650), Y(350), Z(420), A(∞°), B(+181°,-91°), C1(400rpm) - Figure correction : < λ/30~λ/40(PV) depending on measurement system - Availability : Sphere, Asphere, Off-Axis-Parabolic(OAP), Freeform  

- Working range : Spiral (Φ400)_Asphere                          Raster (400 x 400)_Rectangular - Axis structure(mm): X(400), Y(400), Z(225), A(+/-270°), B(+/-180),    H(2000rpm), C(3000rpm) - Axis accuracy : <0.025mm - Availability : Sphere, Asphere, Off-Axis-Parabolic(OAP), Freeform