Specifications

Product Code

ARF • KRF

Substrate Material

UV -grade fused silica

S1 Surface Figure

λ/10 @ 633 nm before coating

S1 Surface Quality

10 -5 scratch and dig

S2 Surface Quality

Commercial polish

Diameter Tolerance

Ø 0/ 0/-0.25 mm

Thickness Tolerance

t ±0.25 mm Wedge

≤5 arc min

Chamfer

0.35 mm at 45° typical

Concentricity

≤0.05 mm

Radius Tolerance

±0.5%

Coating Technology

Electron beam multilayer dielectric

Adhesion and Durability

Per MIL MIL-C-675C. Insoluble in lab solvents.

Clear Aperture

≥85% of central diamet diameter
Damage Threshold

3 J/cm cm2, 8 nsec pulse @ 248 nm

Center Wavelength

193 nm